Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens

A Thermally Tunable Microlens Array on Indium Tin Oxide Glass

We present a polydimethylsiloxane (PDMS) microlens array on a glass substrate. By adjusting the temperature with indium tin oxide (ITO) microheaters, the properties of the individual microlenses are actively tuned without mechanical movement. We characterize the temperature-dependent changes of the microlenses by focal length and magnification measurements. Experimental results demonstrate that...

Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner

This paper presents an effective method of linearizing the electrostatic transfer characteristics of micromachined two–dimensional (2-D) scanners. The orthogonal scan angles of surface micromachined polysilicon scanner are controlled by using quadrant electrodes for electrostatic actuation. By using a pair of differential voltages over a bias voltage, we could improve the distortion of projecte...

Thermally actuated tunable liquid microlens with sub-second response time

Electrostatically Driven Nanoballoon Actuator.

We demonstrate an inflatable nanoballoon actuator based on geometrical transitions between the inflated (cylindrical) and collapsed (flattened) forms of a carbon nanotube. In situ transmission electron microscopy experiments employing a nanoelectromechanical manipulator show that a collapsed carbon nanotube can be reinflated by electrically charging the nanotube, thus realizing an electrostatic...

Electrostatically Driven Microgripper

In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...